An Advanced Characterization Method for the Elastic Modulus of Nanoscale Thin-Films Using a High-Frequency Micromechanical Resonator

An Advanced Characterization Method for the Elastic Modulus of Nanoscale Thin-Films Using a High-Frequency Micromechanical Resonator

Nanoscale materials have properties that frequently differ from those of their bulk form due to the scale effect, and therefore a measurement technique that can take account of such material characteristics with high accuracy and sensitivity is required. In the present study, advanced nanomechanical metrology was developed for evaluation of elastic properties of thin-film materials. A 52 nm thi...

Micromechanical characterization of ALD thin films

Aalto University, P.O. Box 11000, FI-00076 Aalto www.aalto.fi Author Maria Berdova Name of the doctoral dissertation Micromechanical characterization of ALD thin films Publisher School of Chemical Technology Unit Materials Science and Engineering Series Aalto University publication series DOCTORAL DISSERTATIONS 119/2015 Field of research Microelectromechanical systems Manuscript submitted 31 Au...

architecture and engineering of nanoscale sculptured thin films and determination of their properties

چکیده ندارد.

Growth and characterization of nanoscale thin films

An Integrated CMOS Micromechanical Resonator High- Oscillator

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator with the intent of achieving high stability. The operation and performance of micromechanical resonators are modeled, with emphasis on circuit and noise modeling of multiport r...